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- catalog contributor b3020494.
- catalog contributor b3020495.
- catalog contributor b3020496.
- catalog created "c1990.".
- catalog date "1990".
- catalog date "c1990.".
- catalog dateCopyrighted "c1990.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "ix, 250 p. :".
- catalog hasFormat "Characterization of plasma-enhanced CVD processes.".
- catalog identifier "1558990534".
- catalog isFormatOf "Characterization of plasma-enhanced CVD processes.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 165.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 165".
- catalog issued "1990".
- catalog issued "c1990.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Characterization of plasma-enhanced CVD processes.".
- catalog subject "621.381/52 20".
- catalog subject "Integrated circuits Design and construction Congresses.".
- catalog subject "Plasma-enhanced chemical vapor deposition Congresses.".
- catalog subject "TS695.15 .C47 1990".
- catalog title "Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.".
- catalog type "Conference proceedings. fast".
- catalog type "text".