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- catalog contributor b3066758.
- catalog contributor b3066759.
- catalog contributor b3066760.
- catalog contributor b3066761.
- catalog created "c1991.".
- catalog date "1991".
- catalog date "c1991.".
- catalog dateCopyrighted "c1991.".
- catalog description "Fabrication of multilayer x-ray/EUV coatings -- Design, characterization, and test of multilayer x-ray/EUV monochromators and imaging microscopes -- X-ray/EUV telescopes -- Test and calibration performance of x-ray/EUV instruments -- XUV/soft x-ray projection lithography -- X-ray/EUV space observatories and missions -- X-ray/EUV telescopes for solar research -- X-ray/EUV polarimetry -- X-ray/EUV spectrographs -- X-ray/EUV filters and gratings.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xii, 579 p. :".
- catalog hasFormat "X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography.".
- catalog identifier "0819404047 (pbk.)".
- catalog isFormatOf "X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography.".
- catalog isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1343".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1343.".
- catalog issued "1991".
- catalog issued "c1991.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE,".
- catalog relation "X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography.".
- catalog subject "Coatings Congresses.".
- catalog subject "Extreme ultraviolet lithography Congresses.".
- catalog subject "Optical instruments Congresses.".
- catalog subject "Polarimetry Instruments Congresses.".
- catalog subject "TA1775 .X19 1991".
- catalog subject "Ultraviolet astronomy Congresses.".
- catalog subject "X-ray lithography Congresses.".
- catalog subject "X-ray optics Congresses.".
- catalog subject "X-ray optics Instruments Congresses.".
- catalog tableOfContents "Fabrication of multilayer x-ray/EUV coatings -- Design, characterization, and test of multilayer x-ray/EUV monochromators and imaging microscopes -- X-ray/EUV telescopes -- Test and calibration performance of x-ray/EUV instruments -- XUV/soft x-ray projection lithography -- X-ray/EUV space observatories and missions -- X-ray/EUV telescopes for solar research -- X-ray/EUV polarimetry -- X-ray/EUV spectrographs -- X-ray/EUV filters and gratings.".
- catalog title "X-ray/EUV optics for astronomy, microscopy, polarimetry, and projection lithography : 9-13 July 1990, San Diego, California / Richard B. Hoover, Arthur B.C. Walker, Jr., chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.".
- catalog type "Conference proceedings. fast".
- catalog type "text".