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- catalog contributor b3433717.
- catalog contributor b3433718.
- catalog created "1991.".
- catalog date "1991".
- catalog date "1991.".
- catalog dateCopyrighted "1991.".
- catalog extent "xii, 75 p. :".
- catalog identifier "0309045975".
- catalog issued "1991".
- catalog issued "1991.".
- catalog language "eng".
- catalog publisher "Washington, DC : National Academy Press,".
- catalog subject "Plasma engineering.".
- catalog title "Plasma processing of materials : scientific opportunities and technological challenges / Panel on Plasma Processing of Materials, Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.".
- catalog type "text".