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- catalog contributor b3839147.
- catalog contributor b3839148.
- catalog created "c1991.".
- catalog date "1991".
- catalog date "c1991.".
- catalog dateCopyrighted "c1991.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xv, 504 p. :".
- catalog identifier "1558991182".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 224.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 224".
- catalog issued "1991".
- catalog issued "c1991.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog subject "621.381/52 20".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R344 1991".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A. / editors, Jeffrey C. Gelpey ... [et al.].".
- catalog type "text".