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- catalog contributor b3839183.
- catalog contributor b3839184.
- catalog contributor b3839185.
- catalog created "c1992.".
- catalog date "1992".
- catalog date "c1992.".
- catalog dateCopyrighted "c1992.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xv, 552 p. :".
- catalog hasFormat "Photons and low energy particles in surface processing.".
- catalog identifier "1558991301".
- catalog isFormatOf "Photons and low energy particles in surface processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 236.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 236".
- catalog issued "1992".
- catalog issued "c1992.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Photons and low energy particles in surface processing.".
- catalog subject "620/.44 20".
- catalog subject "Lasers Industrial applications Congresses.".
- catalog subject "Photon beams Industrial applications Congresses.".
- catalog subject "Plasma etching Congresses.".
- catalog subject "Plasma-enhanced chemical vapor deposition Congresses.".
- catalog subject "Surfaces (Technology) Congresses.".
- catalog subject "TA418.7 .P46 1992".
- catalog title "Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.".
- catalog type "Conference proceedings. fast".
- catalog type "text".