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- catalog contributor b3930038.
- catalog contributor b3930039.
- catalog created "c1992.".
- catalog date "1992".
- catalog date "c1992.".
- catalog dateCopyrighted "c1992.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xii, 304 p. :".
- catalog identifier "0815512805 :".
- catalog isPartOf "Materials science and process technology series".
- catalog issued "1992".
- catalog issued "c1992.".
- catalog language "eng".
- catalog publisher "Park Ridge, N.J., U.S.A. : Noyes Publications,".
- catalog subject "621.3815/2 20".
- catalog subject "Cathode sputtering (Plating process)".
- catalog subject "TS695 .W37 1992".
- catalog subject "Thin films.".
- catalog title "Handbook of sputter deposition technology : principles, technology, and applications / by Kiyotaka Wasa and Shigeru Hayakawa.".
- catalog type "text".