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- catalog alternative "Ion implantation technology.".
- catalog contributor b4191214.
- catalog created "1992.".
- catalog date "1992".
- catalog date "1992.".
- catalog dateCopyrighted "1992.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "vii, 700 p. :".
- catalog identifier "0444897356 (acid-free paper)".
- catalog issued "1992".
- catalog issued "1992.".
- catalog language "eng".
- catalog publisher "Amsterdam ; New York : North-Holland,".
- catalog subject "530.4/16 20".
- catalog subject "Ion bombardment.".
- catalog subject "QC702.7.I55 H38 1992".
- catalog title "Handbook of ion implantation technology / edited by J.F. Ziegler.".
- catalog title "Ion implantation technology.".
- catalog type "text".