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- catalog contributor b4251463.
- catalog contributor b4251464.
- catalog contributor b4251465.
- catalog contributor b4251466.
- catalog created "1993.".
- catalog date "1993".
- catalog date "1993.".
- catalog dateCopyrighted "1993.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "727 p. ;".
- catalog hasFormat "Chemical perspectives of microelectronic materials III.".
- catalog identifier "1558991778".
- catalog isFormatOf "Chemical perspectives of microelectronic materials III.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 282.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 282".
- catalog issued "1993".
- catalog issued "1993.".
- catalog language "eng".
- catalog publisher "Pittsburg, Pa. : Materials Research Society,".
- catalog relation "Chemical perspectives of microelectronic materials III.".
- catalog subject "621.381 20".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Semiconductors Congresses.".
- catalog subject "Surface chemistry Congresses.".
- catalog subject "TK7874 .C52222 1993".
- catalog title "Chemical perspectives of microelectronic materials III / editors, C.R. Abernathy ... [et al.].".
- catalog type "Boston (Mass., 1992) swd".
- catalog type "Conference proceedings. fast".
- catalog type "text".