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- catalog contributor b4802022.
- catalog contributor b4802023.
- catalog contributor b4802024.
- catalog contributor b4802025.
- catalog contributor b4802026.
- catalog contributor b4802027.
- catalog created "1993.".
- catalog date "1993".
- catalog date "1993.".
- catalog dateCopyrighted "1993.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "424 p. :".
- catalog identifier "1558991999".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 303.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 303".
- catalog issued "1993".
- catalog issued "1993.".
- catalog language "eng".
- catalog publisher "Pittsburgh : Materials Research Society,".
- catalog subject "621.3815/2 20".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .M3687 1993".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal and integrated processing II / editors, Jeffrey C. Gelpey ... [et al.] ; symposium support, AG Associates ... [et al.] ; Symposium G, MRS Spring Meeting, April 12-15, 1993.".
- catalog type "text".