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- catalog contributor b4842964.
- catalog contributor b4842965.
- catalog contributor b4842966.
- catalog created "c1993.".
- catalog date "1993".
- catalog date "c1993.".
- catalog dateCopyrighted "c1993.".
- catalog description "AXAF grazing incidence mirrors -- Grazing incidence optics : theory and high throughput optics -- Multilayer mirror fabrication and characterization -- X-ray/EUV filters, gratings, and polarizers -- X-ray telescopes and observatories -- Multilayer optics for x-ray projection lithography -- Poster session.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xiii, 702 p. :".
- catalog hasFormat "Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography.".
- catalog isFormatOf "Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography.".
- catalog isPartOf "Proceedings / SPIE--the International Society for Optical Engineering ; v. 1742".
- catalog isPartOf "Proceedings of SPIE--the International Society for Optical Engineering ; v. 1742.".
- catalog issued "1993".
- catalog issued "c1993.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash. : The Society,".
- catalog relation "Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography.".
- catalog subject "Extreme ultraviolet lithography Congresses.".
- catalog subject "Grazing incidence Congresses.".
- catalog subject "Mirrors Design and construction Congresses.".
- catalog subject "QB472.A1 M86 1993".
- catalog subject "QB88 .M858 1993".
- catalog subject "TS510 .P632 v. 1742".
- catalog subject "Ultraviolet astronomy Congresses.".
- catalog subject "Ultraviolet astronomy Instruments Design and construction Congresses.".
- catalog subject "X-ray astronomy Instruments Design and construction Congresses.".
- catalog subject "X-ray lithography Congresses.".
- catalog subject "X-ray optics Congresses.".
- catalog tableOfContents "AXAF grazing incidence mirrors -- Grazing incidence optics : theory and high throughput optics -- Multilayer mirror fabrication and characterization -- X-ray/EUV filters, gratings, and polarizers -- X-ray telescopes and observatories -- Multilayer optics for x-ray projection lithography -- Poster session.".
- catalog title "Multilayer and grazing incidence x-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California / Richard B. Hoover and Arthur B.C. Walker, Jr., chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.".
- catalog type "text".