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- catalog contributor b5344720.
- catalog contributor b5344721.
- catalog contributor b5344722.
- catalog created "c1993.".
- catalog date "1993".
- catalog date "c1993.".
- catalog dateCopyrighted "c1993.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 291 p. :".
- catalog identifier "1558992022".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 306.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 306".
- catalog issued "1993".
- catalog issued "c1993.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog subject "621.3815/31 20".
- catalog subject "TK7874 .M342 1993".
- catalog subject "X-ray lithography Congresses.".
- catalog title "Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A. / editors, George K. Celler, Juan R. Maldonado.".
- catalog type "text".