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- catalog contributor b5359051.
- catalog contributor b5359052.
- catalog contributor b5359053.
- catalog contributor b5359054.
- catalog contributor b5359055.
- catalog contributor b5359056.
- catalog created "c1993.".
- catalog date "1993".
- catalog date "c1993.".
- catalog dateCopyrighted "c1993.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 518 p. :".
- catalog hasFormat "Surface chemical cleaning and passivation for semiconductor processing.".
- catalog identifier "1558992138".
- catalog isFormatOf "Surface chemical cleaning and passivation for semiconductor processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 315.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 315".
- catalog issued "1993".
- catalog issued "c1993.".
- catalog language "eng".
- catalog publisher "Pittsburgh, PA : Materials Research Society,".
- catalog relation "Surface chemical cleaning and passivation for semiconductor processing.".
- catalog subject "621.3815/2 20".
- catalog subject "Semiconductors Cleaning Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "Surface chemistry Congresses.".
- catalog subject "Surface preparation Congresses.".
- catalog subject "TK7871.85 .S9155 1993".
- catalog title "Surface chemical cleaning and passivation for semiconductor processing : symposium held April 13-15, 1993, San Francisco, California, U.S.A. / editors, Gregg S. Higashi, Eugene A. Irene, Tadahiro Ohmi.".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1993) swd".
- catalog type "text".