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- catalog contributor b5417810.
- catalog date "1975".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph. D.)--Harvard University, 1975.".
- catalog extent "204 leaves :".
- catalog issued "1975".
- catalog language "eng".
- catalog title "The application of x-ray lithography to microelectronic devices / by Stephen Edward Bernacki.".
- catalog type "text".