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- catalog contributor b6213136.
- catalog contributor b6213137.
- catalog contributor b6213138.
- catalog contributor b6213139.
- catalog contributor b6213140.
- catalog contributor b6213141.
- catalog contributor b6213142.
- catalog created "1994.".
- catalog date "1994".
- catalog date "1994.".
- catalog dateCopyrighted "1994.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "556 p. :".
- catalog hasFormat "Gas-phase and surface chemistry in electronic materials processing.".
- catalog identifier "1558992332".
- catalog isFormatOf "Gas-phase and surface chemistry in electronic materials processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 334.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 334".
- catalog issued "1994".
- catalog issued "1994.".
- catalog language "eng".
- catalog publisher "Pittsburgh, PA : Materials Research Society,".
- catalog relation "Gas-phase and surface chemistry in electronic materials processing.".
- catalog subject "621.3815/2 20".
- catalog subject "Electronics materials Surfaces Congresses.".
- catalog subject "Surface chemistry Congresses.".
- catalog subject "TK7871 .G37 1994".
- catalog title "Gas-phase and surface chemistry in electronic materials processing / editors, T.J. Mountziaris ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "Kongress. swd".
- catalog type "text".