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- catalog contributor b6400210.
- catalog contributor b6400211.
- catalog contributor b6400212.
- catalog contributor b6400213.
- catalog contributor b6400214.
- catalog contributor b6400215.
- catalog contributor b6400216.
- catalog created "1994.".
- catalog date "1994".
- catalog date "1994.".
- catalog dateCopyrighted "1994.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "505 p. :".
- catalog hasFormat "Diagnostic techniques for semiconductor materials processing.".
- catalog identifier "1558992235".
- catalog isFormatOf "Diagnostic techniques for semiconductor materials processing.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 324.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 324".
- catalog issued "1994".
- catalog issued "1994.".
- catalog language "eng".
- catalog publisher "Pittsburgh, PA : Materials Research Society,".
- catalog relation "Diagnostic techniques for semiconductor materials processing.".
- catalog subject "621.3815/2/0287 20".
- catalog subject "Semiconductors Testing Congresses.".
- catalog subject "TK7871.85 .D497 1994".
- catalog title "Diagnostic techniques for semiconductor materials processing : Symposium K held November 29-December 2, 1993, Boston, Massachusetts, USA / editors, O.J. Glembocki ... [et al.].".
- catalog type "Boston (Mass., 1993) swd".
- catalog type "Conference proceedings. fast".
- catalog type "text".