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- catalog contributor b6615649.
- catalog created "c1994.".
- catalog date "1994".
- catalog date "c1994.".
- catalog dateCopyrighted "c1994.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 450 p. :".
- catalog identifier "1558992421".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 342.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 342".
- catalog issued "1994".
- catalog issued "c1994.".
- catalog language "eng".
- catalog publisher "Pittsburgh, PA : Materials Research Society,".
- catalog subject "621.3815/2 20".
- catalog subject "Chemical vapor deposition Congresses.".
- catalog subject "Dielectrics Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R344 1994".
- catalog title "Rapid thermal and integrated processing III : symposium held April 4-7, 1994, San Francisco, California, U.S.A. / editors, Jimmie J. Wortman ... [et al.].".
- catalog type "text".