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- catalog contributor b6830331.
- catalog created "c1994.".
- catalog date "1994".
- catalog date "c1994.".
- catalog dateCopyrighted "c1994.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiv, 768 p. :".
- catalog hasFormat "Advanced metallization for devices and circuits--science, technology, and manufacturability.".
- catalog identifier "1558992375".
- catalog isFormatOf "Advanced metallization for devices and circuits--science, technology, and manufacturability.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 337.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 337".
- catalog issued "1994".
- catalog issued "c1994.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Advanced metallization for devices and circuits--science, technology, and manufacturability.".
- catalog subject "621.3815/2 20".
- catalog subject "Metallic films Congresses.".
- catalog subject "Metallizing Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "TK7871.85 .A3483 1994".
- catalog title "Advanced metallization for devices and circuits--science, technology, and manufacturability : symposium held April 4-8, 1994, San Francisco, California, U.S.A. / editors, S.P. Murarka ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "text".