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- catalog contributor b6928045.
- catalog created "1994.".
- catalog date "1994".
- catalog date "1994.".
- catalog dateCopyrighted "1994.".
- catalog description "Includes bibliographical references.".
- catalog description "Thesis (Ph. D.)--Harvard University, 1994.".
- catalog extent "xviii, 154 leaves :".
- catalog issued "1994".
- catalog issued "1994.".
- catalog language "eng".
- catalog subject "Chemical vapor deposition.".
- catalog subject "Titanium nitride.".
- catalog title "Atmospheric pressure chemical vapor deposition of titanium nitride / by Joshua N. Musher.".
- catalog type "text".