Matches in Harvard for { <http://id.lib.harvard.edu/aleph/006156035/catalog> ?p ?o. }
Showing items 1 to 28 of
28
with 100 items per page.
- catalog contributor b8617020.
- catalog created "c1995.".
- catalog date "1995".
- catalog date "c1995.".
- catalog dateCopyrighted "c1995.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiii, 411 p. :".
- catalog hasFormat "Ultraclean semiconductor processing technology and surface chemical cleaning and passivation.".
- catalog identifier "1558992898 (alk. paper)".
- catalog isFormatOf "Ultraclean semiconductor processing technology and surface chemical cleaning and passivation.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 386.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 386".
- catalog issued "1995".
- catalog issued "c1995.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Ultraclean semiconductor processing technology and surface chemical cleaning and passivation.".
- catalog subject "621.3815/2 20".
- catalog subject "Integrated circuits Design and construction Congresses.".
- catalog subject "Manufacturing processes Cleaning Congresses.".
- catalog subject "Manufacturing processes Congresses.".
- catalog subject "Semiconductors Cleaning Congresses.".
- catalog subject "Surface preparation Congresses.".
- catalog subject "TK7874 .U373 1995".
- catalog title "Ultraclean semiconductor processing technology and surfacechemical cleaning and passivation : symposium held April 17-19, 1995, San Francisco, California, U.S.A. / editors, Michael Liehr ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1995) swd".
- catalog type "text".