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- catalog contributor b9516508.
- catalog created "1996.".
- catalog date "1996".
- catalog date "1996.".
- catalog dateCopyrighted "1996.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "536 p. :".
- catalog identifier "0195105087 (cl)".
- catalog isPartOf "Oxford series in electrical engineering".
- catalog issued "1996".
- catalog issued "1996.".
- catalog language "eng".
- catalog publisher "New York : Oxford University Press,".
- catalog subject "621.3815/2 20".
- catalog subject "Semiconductors Design and construction.".
- catalog subject "TK7871.85 .C25 1996".
- catalog title "The science and engineering of microelectronic fabrication / Stephen A. Campbell.".
- catalog type "text".