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- catalog contributor b9534328.
- catalog contributor b9534329.
- catalog created "1987.".
- catalog date "1987".
- catalog date "1987.".
- catalog dateCopyrighted "1987.".
- catalog description "Includes bibliographies and index.".
- catalog extent "xiv, 426 p. :".
- catalog identifier "0216920051 :".
- catalog identifier "0412013215 (U.S.)".
- catalog issued "1987".
- catalog issued "1987.".
- catalog language "eng".
- catalog publisher "Glasgow : Blackie ; New York : Chapman and Hall,".
- catalog subject "621.3815/2 19".
- catalog subject "Electronic equipment Integrated circuits Manufacture".
- catalog subject "Integrated circuits Design and construction.".
- catalog subject "Semiconductors Design and construction.".
- catalog subject "TK7871.85 .C477 1987".
- catalog title "The Chemistry of the semiconductor industry / edited by S.J. Moss, A.J. Ledwith.".
- catalog type "text".