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- catalog contributor b9701612.
- catalog contributor b9701613.
- catalog contributor b9701614.
- catalog created "[1973]".
- catalog date "1973".
- catalog date "[1973]".
- catalog dateCopyrighted "[1973]".
- catalog description "Includes bibliographical references.".
- catalog extent "xii, 657 p.".
- catalog hasFormat "Ion implantation in semiconductors and other materials.".
- catalog identifier "0306307561".
- catalog isFormatOf "Ion implantation in semiconductors and other materials.".
- catalog isPartOf "IBM research symposia series.".
- catalog isPartOf "The IBM research symposia series".
- catalog issued "1973".
- catalog issued "[1973]".
- catalog language "eng".
- catalog publisher "New York, Plenum Press".
- catalog relation "Ion implantation in semiconductors and other materials.".
- catalog subject "537.6/22".
- catalog subject "Ion implantation Congresses.".
- catalog subject "Semiconductors Congresses.".
- catalog subject "TK7871.85 .I578 1972".
- catalog title "Ion implantation in semiconductors and other materials; [proceedings] Edited by Billy L. Crowder.".
- catalog type "Conference proceedings. fast".
- catalog type "text".