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- catalog contributor b9809681.
- catalog created "1971-72.".
- catalog date "1971".
- catalog date "1971-72.".
- catalog dateCopyrighted "1971-72.".
- catalog description "Includes bibliographies.".
- catalog description "pt. 1. Preparation and properties.--pt. 2. Applications and devices.".
- catalog extent "2 v.".
- catalog identifier "0306671034 (v. 1)0306671069 (v. 2)".
- catalog isPartOf "Handbook of electronic materials ; v. 3, etc.".
- catalog isPartOf "Handbook of electronic materials, v. 3, 6".
- catalog issued "1971".
- catalog issued "1971-72.".
- catalog language "eng".
- catalog publisher "New York, IFI/Plenum,".
- catalog subject "621.381/7".
- catalog subject "Microelectronics Materials.".
- catalog subject "Silicon nitride.".
- catalog subject "TK7871.15.S558 M55 1971".
- catalog tableOfContents "pt. 1. Preparation and properties.--pt. 2. Applications and devices.".
- catalog title "Silicon nitride for microelectronic applications [by] John T. Milek.".
- catalog type "text".