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- catalog alternative "Rapid thermal and integrated processing 5".
- catalog alternative "Rapid thermal and integrated processing five".
- catalog contributor b10055380.
- catalog contributor b10055381.
- catalog created "c1996.".
- catalog date "1996".
- catalog date "c1996.".
- catalog dateCopyrighted "c1996.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 389 p. :".
- catalog hasFormat "Rapid thermal and integrated processing V.".
- catalog identifier "1558993320".
- catalog isFormatOf "Rapid thermal and integrated processing V.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 429.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 429".
- catalog issued "1996".
- catalog issued "c1996.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Rapid thermal and integrated processing V.".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R344 1996".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal and integrated processing 5".
- catalog title "Rapid thermal and integrated processing V : symposium held April 8-12, 1996, San Francisco, California, U.S.A. / editors, J.C. Gelpey ... [et.al.].".
- catalog title "Rapid thermal and integrated processing five".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1996) swd".
- catalog type "text".