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- catalog contributor b10067181.
- catalog contributor b10067182.
- catalog contributor b10067183.
- catalog contributor b10067184.
- catalog contributor b10067185.
- catalog contributor b10067186.
- catalog created "c1996.".
- catalog date "1996".
- catalog date "c1996.".
- catalog dateCopyrighted "c1996.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "597 p. :".
- catalog hasFormat "Advanced metallization for future ULSI.".
- catalog identifier "1558993304 (hardcover)".
- catalog isFormatOf "Advanced metallization for future ULSI.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v.427.".
- catalog isPartOf "Materials Research Society symposium proceedings ; vol. 427".
- catalog issued "1996".
- catalog issued "c1996.".
- catalog language "eng".
- catalog publisher "Pittsburgh, PA : Materials Research Society,".
- catalog relation "Advanced metallization for future ULSI.".
- catalog subject "621.39/5 20".
- catalog subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- catalog subject "Metallic films Congresses.".
- catalog subject "Metallizing Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "TK7874.76 .A32 1996".
- catalog title "Advanced metallization for future ULSI / editors, K.N. Tu ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1996) swd".
- catalog type "text".