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- catalog contributor b10148588.
- catalog created "c1996.".
- catalog date "1996".
- catalog date "c1996.".
- catalog dateCopyrighted "c1996.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Thin film microstructure and process simulation using SIMBAD / Michael J. Brett, Steven K. Dew, and Tom J. Smy -- Mathematical methods for thin film deposition simulations / S. Hamaguchi -- A process model for sputter deposition of thin films using molecular dynamics / C.-C.Fang ... [et al.] -- Feature scale transport and reaction during low-pressure deposition processes / Timothy S. Cale and Vadali Mahadev.".
- catalog extent "xiv, 291 p. :".
- catalog hasFormat "Modeling of film deposition for microelectronic applications.".
- catalog identifier "0125330227".
- catalog isFormatOf "Modeling of film deposition for microelectronic applications.".
- catalog isPartOf "Thin films (San Diego, Calif.) ; v. 22.".
- catalog isPartOf "Thin films ; v. 22".
- catalog issued "1996".
- catalog issued "c1996.".
- catalog language "eng".
- catalog publisher "San Diego : Academic Press,".
- catalog relation "Modeling of film deposition for microelectronic applications.".
- catalog subject "QC176.A1 T48 v.22".
- catalog subject "Thin films Computer simulation Congresses.".
- catalog tableOfContents "Thin film microstructure and process simulation using SIMBAD / Michael J. Brett, Steven K. Dew, and Tom J. Smy -- Mathematical methods for thin film deposition simulations / S. Hamaguchi -- A process model for sputter deposition of thin films using molecular dynamics / C.-C.Fang ... [et al.] -- Feature scale transport and reaction during low-pressure deposition processes / Timothy S. Cale and Vadali Mahadev.".
- catalog title "Modeling of film deposition for microelectronic applications / edited by Stephen Rossnagel.".
- catalog type "Conference proceedings. fast".
- catalog type "text".