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- catalog contributor b10184391.
- catalog created "c1996.".
- catalog date "1996".
- catalog date "c1996.".
- catalog dateCopyrighted "c1996.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Silicon processing / J.G. Wilkes -- Compound semiconductor processing / J.B. Mullin -- Epitaxial growth / T.F. Kuech, M.A. Tischler -- Photolithography / R. Leuschner, G. Pawlowski -- Selective doping / S. Mahajan -- Etching processes in semiconductor manufacturing / K.G. Donohoe, T.R. Turner, K.A. Jackson -- Silicon device structures / C.-Y. Chang, S.M. Sze -- Compound semiconductor device structures / W.E. Stanchina, J.F. Lam -- Silicon device processing / D.-L. Kwong -- Compound semiconductor device processing / J.M. Parsey, Jr. -- Integrated circuit packaging / D.I. Amey -- Interconnection systems / W.H. Knausenberger.".
- catalog extent "689 p. :".
- catalog identifier "3527268294".
- catalog isPartOf "Materials science and technology, a comprehensive treatment ; v. 16".
- catalog issued "1996".
- catalog issued "c1996.".
- catalog language "eng".
- catalog publisher "Weinheim ; New York : VCH,".
- catalog subject "Semiconductors.".
- catalog tableOfContents "Silicon processing / J.G. Wilkes -- Compound semiconductor processing / J.B. Mullin -- Epitaxial growth / T.F. Kuech, M.A. Tischler -- Photolithography / R. Leuschner, G. Pawlowski -- Selective doping / S. Mahajan -- Etching processes in semiconductor manufacturing / K.G. Donohoe, T.R. Turner, K.A. Jackson -- Silicon device structures / C.-Y. Chang, S.M. Sze -- Compound semiconductor device structures / W.E. Stanchina, J.F. Lam -- Silicon device processing / D.-L. Kwong -- Compound semiconductor device processing / J.M. Parsey, Jr. -- Integrated circuit packaging / D.I. Amey -- Interconnection systems / W.H. Knausenberger.".
- catalog title "Processing of semiconductors / volume editor Kenneth A. Jackson.".
- catalog type "text".