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- catalog contributor b10279084.
- catalog contributor b10279085.
- catalog contributor b10279086.
- catalog contributor b10279087.
- catalog contributor b10279088.
- catalog contributor b10279089.
- catalog created "1997.".
- catalog date "1997".
- catalog date "1997.".
- catalog dateCopyrighted "1997.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "242 p. :".
- catalog hasFormat "Materials for mechanical and optical microsystems.".
- catalog identifier "1558993487".
- catalog isFormatOf "Materials for mechanical and optical microsystems.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 444.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 444".
- catalog issued "1997".
- catalog issued "1997.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog relation "Materials for mechanical and optical microsystems.".
- catalog subject "621.381 21".
- catalog subject "Electromechanical devices Materials Congresses.".
- catalog subject "Microelectronics Materials Congresses.".
- catalog subject "Optical films Congresses.".
- catalog subject "TK7870 .M384 1997".
- catalog subject "Thin films Congresses.".
- catalog title "Materials for mechanical and optical microsystems : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A. / editors, Michael L. Reed ... [et al.].".
- catalog type "Boston (Mass., 1996) swd".
- catalog type "Conference proceedings. fast".
- catalog type "text".