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- catalog contributor b10284081.
- catalog contributor b10284082.
- catalog created "1986-1995".
- catalog date "1986".
- catalog date "1986-1995".
- catalog dateCopyrighted "1986-1995".
- catalog description "Includes bibliographical references and indexes.".
- catalog description "v. 1. Process technology. -- v. 2. Process integration. -- v. 3. The submicron MOSFET.".
- catalog extent "3 v. :".
- catalog identifier "0961672137 (v. 1)".
- catalog identifier "0961672145 (v. 2)".
- catalog identifier "0961672153 (v. 3)".
- catalog issued "1986".
- catalog issued "1986-1995".
- catalog language "eng".
- catalog publisher "Sunset Beach, Calif. : Lattice Press,".
- catalog subject "Integrated circuits Very large scale integration.".
- catalog subject "Silicon.".
- catalog subject "TK7874 .W635 1986".
- catalog tableOfContents "v. 1. Process technology. -- v. 2. Process integration. -- v. 3. The submicron MOSFET.".
- catalog title "Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber".
- catalog type "text".