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- catalog alternative "Thin film process technology".
- catalog contributor b10292681.
- catalog contributor b10292682.
- catalog contributor b10292683.
- catalog created "c1995.".
- catalog date "1995".
- catalog date "c1995.".
- catalog dateCopyrighted "c1995.".
- catalog description "Includes bibliographical references and indexes.".
- catalog description "Vol. 1. pts. A-E -- v. 2. pts. F-X and appendicies.".
- catalog extent "1 v. (various pagings) :".
- catalog identifier "0750303115".
- catalog issued "1995".
- catalog issued "c1995.".
- catalog language "eng".
- catalog publisher "Bristol, UK ; Philadelphia : Institute of Physics Pub.,".
- catalog subject "621.3815/2 20".
- catalog subject "Surfaces (Technology) Handbooks, manuals, etc.".
- catalog subject "TA418.9.T45 H36 1995".
- catalog subject "Thin films Handbooks, manuals, etc.".
- catalog tableOfContents "Vol. 1. pts. A-E -- v. 2. pts. F-X and appendicies.".
- catalog title "Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah.".
- catalog title "Thin film process technology".
- catalog type "Handbooks, manuals, etc. fast".
- catalog type "text".