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- catalog alternative "Clean analysis team for semiconductor".
- catalog contributor b10425530.
- catalog date "1989".
- catalog extent "iv, 232 p :".
- catalog identifier "4478240493".
- catalog issued "1989".
- catalog language "jpn".
- catalog publisher "Tōkyō : Daiyamondosha, 1989.".
- catalog subject "Clean rooms.".
- catalog subject "Semiconductor industry.".
- catalog subject "TH7694 .A313 1989x".
- catalog title "880-02 Mitsubishi Denki ni wa cats ga iru = Clean analysis team for semiconductor : urutora kurīnka gijutsu part II / Akahori Masayuki.".
- catalog title "Clean analysis team for semiconductor".
- catalog type "text".