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- catalog contributor b10657908.
- catalog contributor b10657909.
- catalog created "c1997.".
- catalog date "1997".
- catalog date "c1997.".
- catalog dateCopyrighted "c1997.".
- catalog description "Includes bibliographic references and indexes.".
- catalog extent "xi, 434 p. :".
- catalog identifier "1558993746".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 470.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 470".
- catalog issued "1997".
- catalog issued "c1997.".
- catalog language "eng".
- catalog publisher "Pittsburgh, Pa. : Materials Research Society,".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A. / editors, Terrence J. Riley ... [et al.].".
- catalog type "text".