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- catalog contributor b10709800.
- catalog contributor b10709801.
- catalog contributor b10709802.
- catalog created "1994.".
- catalog date "1994".
- catalog date "1994.".
- catalog dateCopyrighted "1994.".
- catalog description "An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xiv, 527 p. :".
- catalog identifier "0841228485 (alk. paper)".
- catalog isPartOf "ACS professional reference book".
- catalog issued "1994".
- catalog issued "1994.".
- catalog language "eng".
- catalog publisher "Washington, DC : American Chemical Society,".
- catalog subject "621.3815/31 20".
- catalog subject "Microlithography Congresses.".
- catalog subject "Photoresists Congresses.".
- catalog subject "Plasma etching Congresses.".
- catalog subject "Semiconductors Etching Congresses.".
- catalog subject "TR940 .I57 1994".
- catalog tableOfContents "An introduction to lithography / Larry F. Thompson -- The lithographic process / Murrae J. Bowden -- Organic resist materials / C. Grant Willson -- Resist processing / Larry Thompson -- Plasma etching / J.A. Mucha, D.W. Hess, and E.S. Aydil.".
- catalog title "Introduction to microlithography / edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden.".
- catalog type "text".