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- catalog contributor b10746456.
- catalog contributor b10746457.
- catalog contributor b10746458.
- catalog created "c1998.".
- catalog date "1998".
- catalog date "c1998.".
- catalog dateCopyrighted "c1998.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "v, 327 p. :".
- catalog identifier "0824799518 (alk. paper)".
- catalog issued "1998".
- catalog issued "c1998.".
- catalog language "eng".
- catalog publisher "New York : Marcel Dekker,".
- catalog subject "621.3815/2 21".
- catalog subject "Manufacturing processes.".
- catalog subject "Microlithography Industrial applications.".
- catalog subject "Photoresists.".
- catalog subject "Semiconductors Design and construction.".
- catalog subject "TK7871.85 .N66 1998".
- catalog title "Micolithography fundamentals in semiconductor devices and fabrication technology / Saburo Nonogaki, Takumi Ueno, Toshio Ito.".
- catalog type "text".