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- catalog alternative "Results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon".
- catalog contributor b10779708.
- catalog contributor b10779709.
- catalog contributor b10779710.
- catalog created "1997.".
- catalog date "1997".
- catalog date "1997.".
- catalog dateCopyrighted "1997.".
- catalog description "Includes bibliographical references (p. 6).".
- catalog extent "iv, 25 p. :".
- catalog isPartOf "NIST special publication ; 400-99".
- catalog isPartOf "Semiconductor measurement technology".
- catalog issued "1997".
- catalog issued "1997.".
- catalog language "eng".
- catalog publisher "Gaithersburg, MD : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,".
- catalog spatial "United States.".
- catalog subject "Ellipsometry.".
- catalog subject "Silica United States.".
- catalog title "Results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon".
- catalog title "The results of an interlaboratory study of ellipsometric measurements of thin film silicon dioxide on silicon [microform] / Barbara J. Belzer and David L. Blackburn.".
- catalog type "text".