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- catalog contributor b10822742.
- catalog contributor b10822743.
- catalog contributor b10822744.
- catalog created "c1998.".
- catalog date "1998".
- catalog date "c1998.".
- catalog dateCopyrighted "c1998.".
- catalog description "Fundamentals of vacuum technology and surface physics -- Creation of vacuum -- Vacuum measurements -- Systems design and components -- Vacuum applications -- Large-scale vacuum-based processes.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xxii, 835 p. :".
- catalog hasFormat "Handbook of vacuum science and technology.".
- catalog identifier "0123520657 (alk. paper)".
- catalog isFormatOf "Handbook of vacuum science and technology.".
- catalog issued "1998".
- catalog issued "c1998.".
- catalog language "eng".
- catalog publisher "San Diego, CA : Academic Press,".
- catalog relation "Handbook of vacuum science and technology.".
- catalog subject "621.5/5 21".
- catalog subject "TJ940 .H59 1998".
- catalog subject "Vacuum technology Handbooks, manuals, etc.".
- catalog tableOfContents "Fundamentals of vacuum technology and surface physics -- Creation of vacuum -- Vacuum measurements -- Systems design and components -- Vacuum applications -- Large-scale vacuum-based processes.".
- catalog title "Handbook of vacuum science and technology / edited by Dorothy M. Hoffman, Bawa Singh, John H. Thomas, III.".
- catalog type "Handbooks, manuals, etc. fast".
- catalog type "text".