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- catalog contributor b10866907.
- catalog created "c1997.".
- catalog date "1997".
- catalog date "c1997.".
- catalog dateCopyrighted "c1997.".
- catalog description "Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA -- Ch. 7. Comparison of Micromachining Techniques -- Ch. 8. Micromachine Development and Packaging -- Ch. 9. Scaling Laws, Actuators, and Power in Miniaturization -- Ch. 10. Microfabrication Applications -- App. A. Metrology Techniques for MEMS.".
- catalog description "Includes bibliographical references (p. 565-569) and index.".
- catalog extent "589 p., [22] p. of plates :".
- catalog hasFormat "Fundamentals of microfabrication.".
- catalog identifier "0849394511 (acid-free paper)".
- catalog isFormatOf "Fundamentals of microfabrication.".
- catalog issued "1997".
- catalog issued "c1997.".
- catalog language "eng".
- catalog publisher "Boca Raton, Fla. : CRC Press,".
- catalog relation "Fundamentals of microfabrication.".
- catalog subject "621.3815/2 20".
- catalog subject "Integrated circuits Design and construction.".
- catalog subject "Lasers Industrial applications.".
- catalog subject "Machining.".
- catalog subject "Microelectromechanical systems Design and construction.".
- catalog subject "Microelectronic packaging.".
- catalog subject "Microelectronics Design and construction.".
- catalog subject "Microelectronics.".
- catalog subject "TK7836 .M33 1997".
- catalog tableOfContents "Ch. 1. Lithography -- Ch. 2. Pattern Transfer with Dry Etching Techniques -- Ch. 3. Pattern Transfer with Additive Techniques -- Ch. 4. Wet Bulk Micromachining -- Ch. 5. Surface Micromachining -- Ch. 6. LIGA -- Ch. 7. Comparison of Micromachining Techniques -- Ch. 8. Micromachine Development and Packaging -- Ch. 9. Scaling Laws, Actuators, and Power in Miniaturization -- Ch. 10. Microfabrication Applications -- App. A. Metrology Techniques for MEMS.".
- catalog title "Fundamentals of microfabrication / Marc Madou.".
- catalog type "text".