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- catalog contributor b10918796.
- catalog contributor b10918797.
- catalog contributor b10918798.
- catalog created "1998.".
- catalog date "1998".
- catalog date "1998.".
- catalog dateCopyrighted "1998.".
- catalog description "Includes bibliographical references and indexes.".
- catalog description "Transmission Electron Microscopy of Semiconductor-Based Products / John Mardinly and David W. Susnitzky -- Failure Analysis Using Voltage Contrast and EBIC / Larry Rice and Wei Chen -- Preparation of TEM Plan-View Sections on Specific Devices Using the Tripod Polisher / J.P. Benedict, R.M. Anderson and S.J. Klepeis -- Applications of Plasma Cleaning for Electron Microscopy of Semiconducting Materials / T.C. Isabell and P.E. Fischione -- Reduction of the Damage Induced in an FIB-Fabricated X-TEM Specimen / N.I. Kato, K. Tsujimoto and N. Miura -- Application of TEM on Sub-Half-Micron Semiconductor Devices / Hony Zhang -- The Challenge and Methods of TEM Cross-Sectioning of <0.25-Micron Plugs / C. Amy Hunt, Yuhong Zhang and David Su.".
- catalog extent "xi, 270 p. :".
- catalog hasFormat "Electron microscopy of semiconducting materials and ULSI devices.".
- catalog identifier "1558994297".
- catalog isFormatOf "Electron microscopy of semiconducting materials and ULSI devices.".
- catalog isPartOf "Materials Research Society Sumposium proceedings ; v. 523".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 523.".
- catalog issued "1998".
- catalog issued "1998.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Electron microscopy of semiconducting materials and ULSI devices.".
- catalog subject "621.3815/2 21".
- catalog subject "Electron microscopy Congresses.".
- catalog subject "Integrated circuits Ultra large scale integration Testing Congresses.".
- catalog subject "Semiconductors Testing Congresses.".
- catalog subject "TK7874.76 .E44 1998".
- catalog tableOfContents "Transmission Electron Microscopy of Semiconductor-Based Products / John Mardinly and David W. Susnitzky -- Failure Analysis Using Voltage Contrast and EBIC / Larry Rice and Wei Chen -- Preparation of TEM Plan-View Sections on Specific Devices Using the Tripod Polisher / J.P. Benedict, R.M. Anderson and S.J. Klepeis -- Applications of Plasma Cleaning for Electron Microscopy of Semiconducting Materials / T.C. Isabell and P.E. Fischione -- Reduction of the Damage Induced in an FIB-Fabricated X-TEM Specimen / N.I. Kato, K. Tsujimoto and N. Miura -- Application of TEM on Sub-Half-Micron Semiconductor Devices / Hony Zhang -- The Challenge and Methods of TEM Cross-Sectioning of <0.25-Micron Plugs / C. Amy Hunt, Yuhong Zhang and David Su.".
- catalog title "Electron microscopy of semiconducting materials and ULSI devices / editors, Clive Hayzelden, Crispin Hetherington, Frances Ross.".
- catalog type "Conference proceedings. fast".
- catalog type "text".