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- catalog contributor b10976894.
- catalog contributor b10976895.
- catalog created "c1998.".
- catalog date "1998".
- catalog date "c1998.".
- catalog dateCopyrighted "c1998.".
- catalog description "Includes bibliographic references and indexes.".
- catalog extent "xiii, 403 p. :".
- catalog hasFormat "Rapid thermal and integrated processing VII.".
- catalog identifier "1558994319".
- catalog isFormatOf "Rapid thermal and integrated processing VII.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 525.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 525".
- catalog issued "1998".
- catalog issued "c1998.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Rapid thermal and integrated processing VII.".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Heat treatment Congresses.".
- catalog subject "TK7871.85 .R3445 1998".
- catalog subject "Vapor-plating Congresses.".
- catalog title "Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A. / editors, Mehmet C. Öztürk ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1998) swd".
- catalog type "text".