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- catalog contributor b11025980.
- catalog contributor b11025981.
- catalog contributor b11025982.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xii, 419 p. :".
- catalog identifier "012533026X".
- catalog isPartOf "Thin films (San Diego, Calif.) ; v. 26.".
- catalog isPartOf "Thin films ; v. 26".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "San Diego, Calif. : Academic Press,".
- catalog subject "621.3815/2 21".
- catalog subject "TK7872.T55 P68 1999".
- catalog subject "Thin film devices Design and construction.".
- catalog subject "Thin films.".
- catalog subject "Vapor-plating.".
- catalog title "PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel.".
- catalog type "text".