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- catalog contributor b11051585.
- catalog created "c1998.".
- catalog date "1998".
- catalog date "c1998.".
- catalog dateCopyrighted "c1998.".
- catalog description "Includes bibliographical references and index.".
- catalog description "Materials Research Society Symposium Proceedings -- Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films / P. Attia and P. Hesto -- Transversal Type Piezoelectric Resonator using ZnO Thin Film on Micro-Fabricated ELINVER (Fe-Ni-Cr-Ti) Alloy / Y. Yoshino -- Multilayer Microelectromechanical Structures For Material Property Characterization / R.I. Pratt and G.C. Johnson -- The Effects of Texture and Doping on the Young's Modulus of Polysilicon / Sangwoo Lee, Changho Cho and Jongpal Kim [and others] -- Mechanical Property Measurement of 0.5[mu]m CMOS Microstructures / M. S-C. Lu, X. Zhu and G.K. Fedder.".
- catalog extent "xi, 248 p. :".
- catalog hasFormat "Microelectromechanical structures for materials research.".
- catalog identifier "1558994246".
- catalog isFormatOf "Microelectromechanical structures for materials research.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 518.".
- catalog isPartOf "Materials Research Society symposium proceedings ; v. 518".
- catalog issued "1998".
- catalog issued "c1998.".
- catalog language "eng".
- catalog publisher "Warrendale, Pa. : Materials Research Society,".
- catalog relation "Microelectromechanical structures for materials research.".
- catalog subject "620.1/1/072 21".
- catalog subject "Materials Research Equipment and supplies Congresses.".
- catalog subject "Microelectromechanical systems Congresses.".
- catalog subject "TA404.2 .M53 1998".
- catalog tableOfContents "Materials Research Society Symposium Proceedings -- Resonance Method: An Attractive Way to Evaluate Mechanical Properties of Thin Gold Films / P. Attia and P. Hesto -- Transversal Type Piezoelectric Resonator using ZnO Thin Film on Micro-Fabricated ELINVER (Fe-Ni-Cr-Ti) Alloy / Y. Yoshino -- Multilayer Microelectromechanical Structures For Material Property Characterization / R.I. Pratt and G.C. Johnson -- The Effects of Texture and Doping on the Young's Modulus of Polysilicon / Sangwoo Lee, Changho Cho and Jongpal Kim [and others] -- Mechanical Property Measurement of 0.5[mu]m CMOS Microstructures / M. S-C. Lu, X. Zhu and G.K. Fedder.".
- catalog title "Microelectromechanical structures for materials research : symposium held April 15-16, 1998, San Francisco, California, U.S.A. / editors, Stuart Brown ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1998) swd".
- catalog type "text".