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- catalog abstract "The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.".
- catalog contributor b11054847.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references (p. [259]-289) and index.".
- catalog description "Introduction -- Interaction of low-energy ions with solids -- Sputtering of multicomponent materials -- Ionization processes at surfaces -- Ion bombardment of crystalline semiconductors -- Summary.".
- catalog description "The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.".
- catalog extent "viii, 293 p. :".
- catalog identifier "3540650075 (alk. paper)".
- catalog isPartOf "Springer tracts in modern physics ; 146.".
- catalog isPartOf "Springer tracts in modern physics, 0081-3869 ; v. 146".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "Berlin ; New York : Springer,".
- catalog subject "539 s 530.4/16 21".
- catalog subject "Chemistry, Physical organic.".
- catalog subject "Chemistry.".
- catalog subject "Ion bombardment.".
- catalog subject "Plasma (Ionized gases).".
- catalog subject "QC1 .S797 vol. 146 QC176.8.R3".
- catalog subject "Solids Effect of radiation on.".
- catalog subject "Surfaces (Physics).".
- catalog tableOfContents "Introduction -- Interaction of low-energy ions with solids -- Sputtering of multicomponent materials -- Ionization processes at surfaces -- Ion bombardment of crystalline semiconductors -- Summary.".
- catalog title "Low-energy ion irradiation of solid surfaces / Hubert Gnaser.".
- catalog type "text".