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- catalog contributor b11248899.
- catalog contributor b11248900.
- catalog created "-c1998.".
- catalog date "-c1998.".
- catalog date "uuuu".
- catalog dateCopyrighted "-c1998.".
- catalog description "Includes bibliographical references and index.".
- catalog description "v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.".
- catalog extent "v. < -2> :".
- catalog identifier "0471966819 (v. 1 : alk. paper)".
- catalog identifier "0471966827 (v. 2 : alk. paper)".
- catalog issued "-c1998.".
- catalog issued "uuuu".
- catalog language "eng".
- catalog publisher "Chichester, England ; New York : Wiley,".
- catalog subject "621.3815/2 21".
- catalog subject "Microfabrication.".
- catalog subject "Micromachining.".
- catalog subject "Semiconductors Design and construction.".
- catalog subject "TK7871.85 .S4295 1997".
- catalog tableOfContents "v. 1. Fundamental electrochemistry and physics -- v. 2. Techniques and industrial applications.".
- catalog title "Semiconductor micromachining / edited by S.A. Campbell, H.J. Lewerenz.".
- catalog type "text".