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- catalog alternative "Microlithography, micromachining, and microfabrication".
- catalog contributor b11266862.
- catalog created "c1997.".
- catalog date "1997".
- catalog date "c1997.".
- catalog dateCopyrighted "c1997.".
- catalog description "Includes bibliographical references and indexes.".
- catalog description "v. 1. Microlithography -- v. 2. Micromachining and microfabrication.".
- catalog extent "2 v. :".
- catalog hasFormat "Handbook of microlithography, micromachining, and microfabrication.".
- catalog identifier "0819423785 (v. 1)".
- catalog identifier "0819423793 (v. 2)".
- catalog isFormatOf "Handbook of microlithography, micromachining, and microfabrication.".
- catalog isPartOf "IEE materials & devices series ; 12A-12B.".
- catalog isPartOf "IEE materials and devices series ; 12A-12B".
- catalog isPartOf "SPIE Press monograph ; PM39-PM40".
- catalog isPartOf "SPIE monograph ; 39-40.".
- catalog issued "1997".
- catalog issued "c1997.".
- catalog language "eng".
- catalog publisher "Bellingham, Wash., USA : SPIE Optical Engineering Press ; London, UK : Institution of Electrical Engineers,".
- catalog relation "Handbook of microlithography, micromachining, and microfabrication.".
- catalog subject "670 21".
- catalog subject "Microfabrication.".
- catalog subject "Microlithography.".
- catalog subject "Micromachining.".
- catalog subject "TK7836 .H3423 1997".
- catalog tableOfContents "v. 1. Microlithography -- v. 2. Micromachining and microfabrication.".
- catalog title "Handbook of microlithography, micromachining, and microfabrication / P. Rai-Choudhury, editor.".
- catalog title "Microlithography, micromachining, and microfabrication".
- catalog type "text".