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- catalog contributor b11295462.
- catalog created "1998.".
- catalog date "1998".
- catalog date "1998.".
- catalog dateCopyrighted "1998.".
- catalog description "Includes bibliographical references (p. [129]-142) and index.".
- catalog extent "xxiv, 148 p. :".
- catalog identifier "0792383583 (alk. paper)".
- catalog isPartOf "Microsystems (Series) ; 2.".
- catalog isPartOf "Microsystems ; 2".
- catalog issued "1998".
- catalog issued "1998.".
- catalog language "eng".
- catalog publisher "Boston, Mass. : Kluwer Academic Publishers,".
- catalog subject "621.39/767 21".
- catalog subject "Optical storage devices.".
- catalog subject "Scanning electron microscopes.".
- catalog subject "TA1635 .C48 1998".
- catalog title "Microcantilevers for atomic force microscope data storage / by Benjamin W. Chui.".
- catalog type "text".