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- catalog contributor b11341933.
- catalog created "1999.".
- catalog date "1999".
- catalog date "1999.".
- catalog dateCopyrighted "1999.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xi, 298 p. :".
- catalog identifier "1558994750".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 568.".
- catalog isPartOf "Materials Research Society symposium proceedings, 0272-9172 ; v. 568".
- catalog issued "1999".
- catalog issued "1999.".
- catalog language "eng".
- catalog publisher "Warrendale, PA : Materials Research Society,".
- catalog subject "621.3815/2 21".
- catalog subject "Semiconductor doping Congresses.".
- catalog subject "Semiconductors Defects Congresses.".
- catalog subject "Semiconductors Design and construction Congresses.".
- catalog subject "Silicon Congresses.".
- catalog subject "TK7871.85 .S536 1999".
- catalog title "Si front-end processing : physics and technology of dopant-defect interactions : symposium held April 6-9, 1999, San Francisco, California, U.S.A. / editors, Hans-Joachim L. Gossmann ... [et al.].".
- catalog type "text".