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- catalog contributor b11377926.
- catalog created "1999.".
- catalog date "1999".
- catalog date "1999.".
- catalog dateCopyrighted "1999.".
- catalog description "In Situ Real-Time Studies of Film Growth Processes Using Ion Scattering and Direct Recoil Spectroscopy Techniques / V.S. Smentkowski, A.R. Krauss and O. Auciello / [and others] -- Combined Spectroscopic Ellipsometry and Ion Beam Surface Analysis for In Situ, Real-Time Characterization of Complex Oxide Film Growth / A.H. Mueller, Y. Gao and E.A. Irene / [et al.] -- In Situ Real-Time Depth Profiling by Elastic Recoil Detection and Its Application to Ion Nitriding of Stainless Steel / O. Kruse, S. Parascandola and R. Groetzschel / [et al.] -- In Situ Etch Rate Measurements by Alpha-Particle Energy Loss / Y. Levy, A. Ballestad and M. Davies / [et al.].".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xi, 199 p. :".
- catalog hasFormat "In situ process diagnostics and modelling.".
- catalog identifier "1558994769".
- catalog isFormatOf "In situ process diagnostics and modelling.".
- catalog isPartOf "Materials Research Society symposia proceedings ; v. 569.".
- catalog isPartOf "Materials Research Society symposium proceedings, 02729172 ; v. 569".
- catalog issued "1999".
- catalog issued "1999.".
- catalog language "eng".
- catalog publisher "Warrendale, PA : Materials Research Society,".
- catalog relation "In situ process diagnostics and modelling.".
- catalog subject "621.3815/2 21".
- catalog subject "Lasers Industrial applications Congresses.".
- catalog subject "Plasma diagnostics Congresses.".
- catalog subject "TK7872.T55 I53 1999".
- catalog subject "Thin film devices Design and construction Congresses.".
- catalog tableOfContents "In Situ Real-Time Studies of Film Growth Processes Using Ion Scattering and Direct Recoil Spectroscopy Techniques / V.S. Smentkowski, A.R. Krauss and O. Auciello / [and others] -- Combined Spectroscopic Ellipsometry and Ion Beam Surface Analysis for In Situ, Real-Time Characterization of Complex Oxide Film Growth / A.H. Mueller, Y. Gao and E.A. Irene / [et al.] -- In Situ Real-Time Depth Profiling by Elastic Recoil Detection and Its Application to Ion Nitriding of Stainless Steel / O. Kruse, S. Parascandola and R. Groetzschel / [et al.] -- In Situ Etch Rate Measurements by Alpha-Particle Energy Loss / Y. Levy, A. Ballestad and M. Davies / [et al.].".
- catalog title "In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A. / editors: Orlando Auciello ... [et al.].".
- catalog type "Conference proceedings. fast".
- catalog type "San Francisco (Calif., 1999) swd".
- catalog type "text".