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- catalog contributor b11395356.
- catalog contributor b11395357.
- catalog contributor b11395358.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references.".
- catalog extent "p. 170-350 :".
- catalog isPartOf "Materials science in semiconductor processing, 1369-8001 ; v. 1, no. 3/4".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "Kidlington, Oxford, U.K. : Pergamon,".
- catalog subject "Integrated circuits Ultra large scale integration Design and construction Congresses.".
- catalog subject "Rapid thermal processing Congresses.".
- catalog subject "Semiconductor doping Congresses.".
- catalog title "Papers presented at the European Materials Research Society 1998 Meeting. Symposium I: Rapid Thermal Processing / guest editors: A. Slaoui ... [et al.].".
- catalog type "text".