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- catalog contributor b11413915.
- catalog contributor b11413916.
- catalog contributor b11413917.
- catalog contributor b11413918.
- catalog created "c1999.".
- catalog date "1999".
- catalog date "c1999.".
- catalog dateCopyrighted "c1999.".
- catalog description "Includes bibliographical references and indexes.".
- catalog extent "xiv, 301 p. :".
- catalog identifier "3908450403".
- catalog isPartOf "Diffusion and defect data. Pt. B, Solid state phenomena ; v. 65/66.".
- catalog isPartOf "Solid state phenomena ; v. 65/66".
- catalog issued "1999".
- catalog issued "c1999.".
- catalog language "eng".
- catalog publisher "Zuerich-Uetikon, Switzerland : Scitec Publications ; Enfield, N.H. : Distributed in the Americas by Trans Tech Publications,".
- catalog subject "Silicon Surfaces Congresses.".
- catalog subject "Surfaces (Technology) Congresses.".
- catalog title "Ultra clean processing of silicon surfaces : proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98), held in Ostend, Belgium, September 21-23, 1998 / editors, Marc Heyns, Marc Meuris and Paul Mertens.".
- catalog type "text".