Matches in Harvard for { <http://id.lib.harvard.edu/aleph/008242456/catalog> ?p ?o. }
Showing items 1 to 23 of
23
with 100 items per page.
- catalog contributor b11465851.
- catalog contributor b11465852.
- catalog contributor b11465853.
- catalog created "c2000.".
- catalog date "2000".
- catalog date "c2000.".
- catalog dateCopyrighted "c2000.".
- catalog description "Includes bibliographical references and index.".
- catalog extent "xv, 307 p. :".
- catalog hasFormat "Chemical mechanical polishing in silicon processing.".
- catalog identifier "0127521720".
- catalog isFormatOf "Chemical mechanical polishing in silicon processing.".
- catalog isPartOf "Semiconductors and semimetals ; v. 63".
- catalog issued "2000".
- catalog issued "c2000.".
- catalog language "eng".
- catalog publisher "San Diego, Calif. : Academic Press,".
- catalog relation "Chemical mechanical polishing in silicon processing.".
- catalog subject "Grinding and polishing.".
- catalog subject "QC612.S4 W5 v.63 2000".
- catalog subject "Silicon.".
- catalog title "Chemical mechanical polishing in silicon processing / volume editors Shin Hwa Li, Robert O. Miller".
- catalog type "text".